[21a-C309-1~13] 6.1 Ferroelectric thin films

△ [21a-C309-5] Study of crystal structures and piezoelectric properties on epitaxial (K,Na)NbO₃ thin films grown on Si substrates

〇Geng Tan¹, Takuya Fujita¹, Sang Hyo Kweon¹, Tomoyuki Koganezawa², Isaku Kanno¹ (1.Kobe Univ., 2.JASRI)

Keywords:lead-free thin films, In-situ XRD observation

(K,Na)NbO₃ (KNN) lead-free thin films have been receiving much attention owing to their relatively high piezoelectric properties comparable to Pb(Zr,Ti)O₃ (PZT) thin films. KNN thin films are expected to be suitable alternatives to PZT thin films. In order to improve the piezoelectric properties of KNN thin films, it is essential to understand the correlation between crystal structures and piezoelectric properties. In this study, we fabricated epitaxial KNN thin films on Si substrates and investigated the crystal structures and piezoelectric properties. We also measured synchrotron X-ray diffraction (XRD) of KNN thin films under applied DC voltages and compared with polycrystalline KNN thin films.