[21a-C309-1~13] 6.1 Ferroelectric thin films

[21a-C309-9] MEMS 1D-Arrayed Tactile Display based on PZT Thin Film

〇Kosuke Takahara¹, Hazwani Nasir¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (1.Univ. of Hyogo)

Keywords:PZT, MEMS, Tactile Display

With the expansion of IoT society in recent years, research and development of wearable devices is extremely active. We have fabricated a thin film, resin, low-voltage drive, low power consumption, and large deformation capability elements that are essential elements for wearable devices by using a PZT thin film / resin laminated structure. At this time, in order to produce tactile displays that arrayed them, we conducted tactile experiments using a one-dimensionally arranged device as a precursor to confirm changes in perceptual recognition.