[21a-C310-1~12] 6.4 Thin films and New materials

[21a-C310-12] Preparation and evaluation of niobium-, titanium- and tungsten-doped vanadium oxide multi-layered films for thermal flow sensors

Mami Yokokura¹, Naoki Otsuka¹, Shotaro Nakamura¹, Junpei Nishi¹, 〇Takahiro Himuro¹, Yoji Saito¹ (1.Seikei Univ.)

Keywords:thermal flow sensor, vanadium oxide, multi-layered films

We newly fabricated the Nb-, W- and Ti-doped vanadium oxide (VO₂) films for thermal flow sensors. In this study, we tried to optimize the Nb, W and Ti doping content in VO₂ multi-layered films and investigated their electrical properties.