[21a-E319-1~5] 6.5 Surface Physics, Vacuum

[21a-E319-3] Development of nonevaporable getter (NEG) pump using oxygen-free Pd/Ti coating

〇Takashi Kikuchi¹, Yuta Sato², Tetsuya Miyazawa³, Shinya Ohno², Kazuhiko Mase^1,3 (1.KEK IMSS, 2.Yokohama Natl Univ, 3.SOKENDAI)

Keywords:vacuum

We have developed a new non-evaporable getter (NEG) pump using oxygen-free Pd/Ti. The features of this NEG pump are: 1) Evacuate hydrogen and carbon monoxide by baking at 125 to 150 °C for 6 hours; 2) the pumping speeds do not decrease even iwhen air introduction and baking are repeated, 3) no need for current feedthroughs or dedicated power supply; 4) vibration free, noise free, light weight, no use of electric power other than activation, etc.