The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[21a-E319-1~5] 6.5 Surface Physics, Vacuum

Sat. Sep 21, 2019 9:00 AM - 10:15 AM E319 (E319)

Masaru Takizawa(立命館大)

9:30 AM - 9:45 AM

[21a-E319-3] Development of nonevaporable getter (NEG) pump using oxygen-free Pd/Ti coating

Takashi Kikuchi1, Yuta Sato2, Tetsuya Miyazawa3, Shinya Ohno2, Kazuhiko Mase1,3 (1.KEK IMSS, 2.Yokohama Natl Univ, 3.SOKENDAI)

Keywords:vacuum

We have developed a new non-evaporable getter (NEG) pump using oxygen-free Pd/Ti. The features of this NEG pump are: 1) Evacuate hydrogen and carbon monoxide by baking at 125 to 150 °C for 6 hours; 2) the pumping speeds do not decrease even iwhen air introduction and baking are repeated, 3) no need for current feedthroughs or dedicated power supply; 4) vibration free, noise free, light weight, no use of electric power other than activation, etc.