[21a-PA2-1~31] 6.3 Oxide electronics

[21a-PA2-30] Fabrication and electrochemical evaluation of 5 V class cathode thin-films

〇Susumu Shiraki¹ (1.Nippon Inst. Tech.)

Keywords:thin film, all-solid-state battery, vacuum

All-solid-state lithium batteries using an inorganic solid-electrolyte are expected to become next-generation batteries owing to their safety, large capacity, and high energy density compared with present lithium-ion batteries based on liquid organic electrolytes. Recent progress in thin-film deposition techniques of electrodes and solid-electrolytes has made it possible to fabricate all-solid-state thin-film batteries with atomically controlled interfaces. In this study, we fabricated epitaxial thin-films of 5 V class LiNi_0.5Mn_1.5O₄ cathode by using RF sputtering.