[21a-PB1-1~86] 17 Nanocarbon Technology (Poster)

[21a-PB1-82] Miniaturization of graphene mechanical resonator for ultra-sensitive force measurement

〇(M1)Hirofumi Ikemoto¹, Kaito Nakagawa¹, Taichi Inoue¹, Kuniharu Takei¹, Takayuki Arie¹, Seiji Akita¹ (1.Osaka Pref. Univ.)

Keywords:mechanical resonator, Q factor, detection sensitivity

Last time, by reducing the size of the graphene resonator (G-MR) from 6 to 2 μm, it was reported that the resonance frequency increased by 10 times and the Q factor increased by 5 times, thereby improving the force detection sensitivity by 7 times. In order to achieve higher sensitivity, the Q factor of the submicron G-MR was compared with that of 2 μm G-MR.