The 66th JSAP Spring Meeting, 2019

Takumi Tomizawa

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 7:00 PM W541 (W541)

  • Oral presentation
  • | 15 Crystal Engineering
  • | 15.4 III-V-group nitride crystals

[10p-W541-1~20] 15.4 III-V-group nitride crystals

6:15 PM - 6:30 PM

[10p-W541-18] Simulation of a GaN MOVPE Process in a Vertical Crystal Growth Apparatus

〇Takumi Tomizawa1, Kento Kawakami2, Teruo Sakurai2, Akira Kusaba3, Naoya Okamoto2, Katsunori Yoshimatsu4, Yoshiaki Daigo5, Ichiro Mizushima5,6, Takashi Yoda5,6, Yoshihiro Kangawa3, Koichi Kakimoto3, Kenji Shiraishi4 (1.Depertment of Eng., Nagoya Univ., 2.Grad. Sch. of Eng., Nagoya Univ., 3.RIAM, Kyushu Univ., 4.IMaSS, Nagoya Univ., 5.NuFlare Technology, Inc., 6.FIRST, Tokyo Institute of Technology)