09:30 〜 11:30 ▲ [10a-PA4-10] Effect of different divalent cations on the piezoelectric and mechanical properties of MTiAlN-based thin films (M = Mg or Zn) 〇Sri Ayu Anggraini1、Masato Uehara1、Kenji Hirata1、Hiroshi Yamada1、Morito Akiyama1 (1.AIST)