[10a-M101-1~8] 10.1 新物質・新機能創成（作製・評価技術）

▲ [10a-M101-3] Magnetic and structural analysis of Pt/Co thin films deposited on Si/SiO₂ substrates annealed by RTA

〇Ryo Toyama¹、Shiro Kawachi^1,2、Soshi Iimura¹、Jun-ichi Yamaura^1,2、Youichi Murakami^1,2、Hideo Hosono¹、Yutaka Majima¹ (1.Tokyo Institute of Technology、2.KEK)

キーワード：CoPt, thin film

We fabricate Pt/Co thin films onto thermally-oxidized Si substrates with Ti layer deposited by electron-beam evaporation. These films are subsequently annealed by rapid thermal annealing (RTA) to make ferromagnetic Co-Pt alloys. The surface morphologies of the films are observed by a scanning electron microscope (SEM). Their crystalline structures and magnetic properties are also characterized by X-ray diffraction (XRD) at KEK (BL-8B) and a vibrating sample magnetometer (VSM), respectively. From the SEM images, clear change in surface morphology between the films before and after annealing at above 400 °C is observed. The M-H loops of the films before and after annealing at 400 °C indicate that the annealing makes Co-Pt alloys with larger saturation magnetization.