[10a-M103-1~7] 8.6 Plasma Electronics English Session

▼ [10a-M103-2] Oxygen Radical Measurement of Atmospheric Pressure Microwave Line Plasma by Vacuum Ultraviolet Absorption Spectroscopy

〇(M2)Hansin BAE¹、Koike Yosuke¹、Hirotsugu Koma¹、Haruka Suzuki¹、Seigo Takashima³、Hirotaka Toyoda^1,2 (1.Nagoya Univ.、2.PLANT, Nagoya Univ.、3.Industries Promotion Corporation, Nagoya)

キーワード：O radical diagnostic, Atmospheric pressure plasma

We have developed atmospheric pressure microwave line plasma (APMLP) source of ~1 m in length. In this study, O radical density of APMLP is measured by vacuum ultra violet absorption spectroscopy (VUVAS) and O2 gas flow rate dependence of O radical density is measured. Furthermore, spatial dependences of O radical density along the long plasma is measured.