The 66th JSAP Spring Meeting, 2019

Presentation information

Print

Poster presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[10a-PA2-1~11] 3.8 Optical measurement, instrumentation, and sensor

Sun. Mar 10, 2019 9:30 AM - 11:30 AM PA2 (PA)

9:30 AM - 11:30 AM

[10a-PA2-3] Nondestructive observation of a semiconductor thin film using visible light OCT

〇Kazumasa Ishida1, Nobuhiko Ozaki1, Naoki Ikeda2, Yoshimasa Sugimoto2 (1.Wakayama Univ., 2.NIMS)

Keywords:Optical coherence tomography, Nondestructive observation, semiconductor thin film