[10a-PA3-1~10] 6.1 Ferroelectric thin films

[10a-PA3-10] Investigation of Residual Proton in Substrate of Ferroelectric Film Deposition

〇Masaki Yamaguchi^1,2, Yoichiro Masuda³, Misa Yamasaki¹, Jun Hirade¹ (1.Shibaura Inst. of Tech., 2.RCGI, Shibaura Inst. of Tech., 3.Hachinohe Inst. of Tech.)

Keywords:Ferroelectric, Proton Beam

We think that a focused proton beam is suitable for processing ferroelectric materials with a high aspect ratios. In this study, we describe the remaining protons in dosed samples.