The 66th JSAP Spring Meeting, 2019

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[10a-S224-1~8] 7.5 Ion beams

Sun. Mar 10, 2019 9:30 AM - 11:30 AM S224 (S224)

Satoshi Abo(Osaka Univ.), Takaaki Aoki(Kyoto Univ.)

11:15 AM - 11:30 AM

[10a-S224-8] Improvement in the Resolution of Imaging by Mist Deposition on a Polymer

〇Taiki Matsuda1, Toshio Seki2, Takaaki Aoki1, Jiro Matsuo1 (1.Grad. Sch. of Eng., Kyoto Univ., 2.ACCMS, Kyoto Univ.)

Keywords:SIMS, mist