4:00 PM - 6:00 PM
[10p-PA6-6] Peel strength evaluation of the Al foil/AlN junctions by surface activated bonding
Keywords:Surface activated bonding method, Power device, AlN
Poster presentation
7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication (Poster)
Sun. Mar 10, 2019 4:00 PM - 6:00 PM PA6 (PA)
4:00 PM - 6:00 PM
Keywords:Surface activated bonding method, Power device, AlN