[10p-S421-1~9] 12.7 Biomedical Engineering and Biochips

△ [10p-S421-4] FABRICATION OF CAVITY-SEALED OPTICAL INTERFEROMETRIC SURFACE STRESS BIOSENSOR BY THIN FILM TRANSFER TECHNIQUE

〇Toshiaki Takahashi¹, Yong-Joon Choi¹, Satoshi Maruyama¹, Miki Taki¹, Kazuaki Sawada¹, Kazuhiro Takahashi^1,2 (1.Toyohashi Tech., 2.JST-PRESTO)

Keywords:surface stress sensor, Fabry-Perot interferometer, biosensor

We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by transfer technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing.
We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7 fold compared with the conventional sensor.