[10p-W631-1~12] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

[10p-W631-12] Simulation on Coherency of Polarization in Ferroelectric Negative Capacitance and Its Evolution Based on TCAD

〇Hiroyuki Ota¹, Tsutomu Ikegami¹, Koichi Fukuda¹, Junichi Hattori¹, Hidehiro Asai¹, Kazuhiko Endo¹, Shinji Migita¹, Akira Toriumi² (1.AIST, 2.Univ. of Tokyo)

Keywords:ferroelectric, negative capacitance, steep subthreshold

We have simulated the evolution of the polarization from a multidomain state to a single domain state using our in-house TCAD (Impulse TCAD) in which inhomogeneous ferroelectric polarization can be factored in. In our simulation, a double domain polarization state in a metal/ferroelectric/SiO₂ layer/metal structure was supposed as an initial state, then the evolution of the polarization was calculated. As a result, we revealed that a single domain polarization is inclined to be formed in the case of the strong couple of the polarization or a larger domain wall thickness more than the device size concerned. Conversely, with diminishing the strength of the polarization coupling, we found that a multidomain polarization is inevitably formed.