[11p-M116-1~15] 1.5 Instrumentation, measurement and Metrology

[11p-M116-6] Development of primary standard for number concentration in liquid-borne particles by the optical particle counter for liquid with the method for simultaneous measurement of mass

〇Takayuki Sakaguchi¹, Yuki Kuruma¹, Hiromu Sakurai¹ (1.AIST NMIJ)

Keywords:particle number concentrtion, uncertainty, national standard

The National Institute of Advanced Industrial Science and Technology (AIST) has developed a primary standard for the number concentration of particles in liquid and has carried out calibration works. The concentration range of the number of particles to be calibrated is 5×10² /g to 2×10⁶ /g. The normal target particle center particle size range has been expanded from 2 μm - 20 μm, which has been supplied so far, to 600 nm - 20 μm. In addition, a primary standard with reduced calibration uncertainty was developed. The calibration and measurement capability of concentration C _{was U=0.0148C0. The main factor of uncertainty was the uncertainty due to the discrimination of aggregated particles. In the small particle size range, uncertainty due to counting termination was the main factor.}