The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

[11p-PB3-1~27] 13.7 Compound and power electron devices and process technology

Mon. Mar 11, 2019 1:30 PM - 3:30 PM PB3 (PB)

1:30 PM - 3:30 PM

[11p-PB3-24] Evaluation of single crystal β-Ga2O3 surface roughness by dry etching

〇(B)Yuuki Moriyama1, Kota Uzaki1, Satoko Shinkai2 (1.Kyuukou Univ, 2.Kyuukou Micro)

Keywords:Ga2O3