[12a-M113-1~8] 15.5 Group IV crystals and alloys

[12a-M113-4] Model fitting for pseudo-dielectric functions of 2D and 3D Ge films on SiO₂ substrate

〇Housei Akazawa¹ (1.NTT Device Innovation Center)

Keywords:Ge, spectroscopic ellipsometry, dielectric function

Spectroscopic elipsometry is a powerful optical technique for analyzing semiconductor thin films. In the conventional analysis, the dielectric functions of the component is taken from standard tables or dispersion relation is assumed. We investigated whether effective medium approximation using c-Ge and a-Ge component dielectric functions is suitably appiled to represent dielectric functions of polycrystalline, microcrystalline, and nanocrystalline Ge for 2D thin film and 3D dot structures.