[12a-PA3-1~26] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12a-PA3-1] ZnO crystals grown by mist chemical vapor deposition technique on a sapphire substrate with thin metal layer

Taiki Kimura¹, Kosei Ohashi¹, Kenya Fujiwara¹, Mikihiro Yamamoto¹, Kazuhiko Hara¹, 〇Tetsuya Kouno¹ (1.Shizuoka Univ.)

Keywords:ZnO, Mist-CVD