The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12a-PA3-1~26] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PA3 (PA)

9:30 AM - 11:30 AM

[12a-PA3-19] Ga Amount Dependence of Electrical Properties for ZnO Based Conductive Films

Yumika Yamada1, Rei Sugiura2, Kuniki Matsubara2, Yuto Ban2, Shuhei Funaki1, Yasuji Yamada1 (1.Shimane Univ., Nat. Sci. Technol., 2.Shimane Univ., Sci. Eng.)

Keywords:Transparent conductive film, ZnO, Sputtering