[12a-PB3-1~16] 13.4 Si系プロセス・Si系薄膜・MEMS・装置技術

▲ [12a-PB3-16] Fabrication of crystalline silicon solar cells by rapid heating with carbon heating tube

〇Toshitaka Kikuchi¹、Takashi Sugawara¹、Takuma Uehara¹、Tomoyoshi Miyazaki^2,1、Go Kobayashi³、Masahiko Hasumi¹、Takuji Arima¹、Toshiyuki Sameshima¹ (1.Tokyo University of Agriculture and Technology、2.Techno Research., Ltd.、3.ORC MANUFACTURING CO.,LTD)

キーワード：solar cell, rapid-thermal-heating, microwave