[12p-M111-1~13] 15.7 Crystal characterization, impurities and crystal defects

[12p-M111-1] First-principles analysis on interaction between metal atom and dopant complex in Si crystal

〇Hiroki Nagakura^1,2, Koji Sueoka² (1.Sony Semicconductor Manufacturing, 2.Okayama Prefectural Univ.)

Keywords:semiconductor, metal