[12p-W611-1~11] 3.13 Semiconductor optical devices

[12p-W611-7] Beam deflection characteristics of MEMS VCSEL integrated DBR waveguide scanner

〇Toshihiro Asahi¹, Xiaodong Gu¹, Takahiro Sakaguchi¹, Fumio Koyama¹ (1.FIRST, Tokyo Tech)

Keywords:VCSEL, Beam Deflector

In recent years, interest in robots, automobiles, and even fully automated manufacturing has increased. For these automatic driving, advanced 3D sensing technology is required. Since LiDAR is one of them and uses short wavelength light, it is possible to precisely measure the shape and distance of the object. In this report, we report on the deflection behavior of the device with tunable VCSEL integrated into distributed Bragg reflector waveguide for the realization of high-performance beam scanner indispensable for LiDAR system.