The 66th JSAP Spring Meeting, 2019

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[9p-PA1-1~28] 6.4 Thin films and New materials

Sat. Mar 9, 2019 1:30 PM - 3:30 PM PA1 (PA)

1:30 PM - 3:30 PM

[9p-PA1-12] Epitaxial growth and electrical properties of (Mg,Ti)OxNy thin films

〇Aya Ogura1, Takashi Suemasu1, Hideto Yanagihara1, Hidekazu Saitoh2 (1.Tsukuba Univ., 2.AIST)

Keywords:oxynitride