The 66th JSAP Spring Meeting, 2019

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[9p-PA3-1~18] 6.2 Carbon-based thin films

Sat. Mar 9, 2019 4:00 PM - 6:00 PM PA3 (PA)

4:00 PM - 6:00 PM

[9p-PA3-5] Fabrication of Boron Doped DLC film using Poly Boron Film

〇(M1C)Keita Fujimoto1, Yasuharu Ohgoe1, Kenji Hirakuri1, Toshiyuki Yaguchi1, Akihiko Homma1 (1.Tokyo Denki Univ.)

Keywords:amorphous carbon thin films