[9p-PA4-1~30] 6.3 Oxide electronics

[9p-PA4-8] Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe

〇(M2)Yuta Takamura¹, Shinji Takayanagi², Takahiko Yanagitani³, Mami Matsukawa¹ (1.Doshisha Univ., 2.Nagoya Inst. Tech., 3.Waseda Univ.)

Keywords:c-Axis parallel oriented ZnO film, Sputtering deposition, Pipe substrate