[9p-W323-1~17] 8.1 Plasma production and diagnostics

[9p-W323-15] Measurement of Plasma Parameters under Extremely Low Power Microwave Conditions for Experiments Synthesizing Iron Endohedral Fullerene in Gas Phase and Device Improvements

〇Koji Onishi¹, Kota Hamada¹, Tatsuto Takeda¹, Takayuki Omori¹, Kazuki Okumura¹, Yushi Kato¹ (1.Osaka Univ.)

Keywords:fullerene, plasma, electron cyclotron resonance