The 66th JSAP Spring Meeting, 2019

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[9p-W323-1~17] 8.1 Plasma production and diagnostics

Sat. Mar 9, 2019 1:30 PM - 6:00 PM W323 (W323)

Hiroshi Akatsuka(Tokyo Tech), Tsuyohito Ito(東大)

2:00 PM - 2:15 PM

[9p-W323-3] In-situ Measurements of Electron Density and Film Thickness by Curling Probe

Mizuki Hanajima1, Keiji Nakamura1, Hideo Sugai2, 〇(B)DAISUKE OGAWA1 (1.Chubu University, 2.Nagoya Industrial Sci. Res. Inst.)

Keywords:Plasma Diagnostics, Film Deposition, In-situ