3:00 PM - 3:15 PM
△ [11p-Z12-10] Effect of nitrogen doping on intrinsic point defect behavior in growing CZ-Si crystal
〇Motoharu Taniguchi1, Koji Sueoka2, Masataka Hourai3 (1.M.S.Okyayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO)
Fri. Sep 11, 2020 12:30 PM - 5:15 PM Z12
3:00 PM - 3:15 PM
〇Motoharu Taniguchi1, Koji Sueoka2, Masataka Hourai3 (1.M.S.Okyayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO)