Yurina Amamoto

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

[10p-Z10-11] Development of long term stable platinum microheater

〇Yurina Amamoto¹, Akasaka Shunsuke^1,2, Kanno Isaku² (1.ROHM, 2.Kobe Univ.)