Akira Sakamoto

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 6:00 PM Z09

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-Z09-1~20] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:45 PM - 2:00 PM

[10p-Z09-6] Quantitative evaluation of N concentration of WN films using atom probe tomography

〇Akira Sakamoto¹, Akira Kuramoto¹, Teruyuki Kinno¹ (1.Kioxia)