Satoshi Nakano

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:30 PM - 5:15 PM Z12

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[11p-Z12-1~17] 15.7 Crystal characterization, impurities and crystal defects

12:30 PM - 12:45 PM

[11p-Z12-1] Dependence of phosphorus evaporation flux for phosphorus concentration during silicon crystal growth

〇Satoshi Nakano¹, Xin Liu¹, Xuefeng Han¹, Koichi Kakimoto¹ (1.RIAM, Kyushu Univ.)