Reijiro Shimura

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

9:45 AM - 10:00 AM

△ [10a-Z24-5] Preparation of HfO₂-based ferroelectric thick films at room temperature by the sputtering method and their electrical and piezoelectric properties

〇(PC)Reijiro Shimura¹, Takanori Mimura¹, Akinori Tateyama¹, Takao Shimizu¹, Hiroshi Funakubo¹ (1.Tokyo Tech. SMCT)