Mayumi Takeyama

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 12:45 PM - 5:15 PM Z09

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11p-Z09-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:45 PM - 5:00 PM

[11p-Z09-14] Structural analysis of ultrathin TaWN barriers with Cu(111) orientation control

〇Mayumi Takeyama¹, Masaru Sato¹, Mitsunobu Yasuda² (1.Kitami Inst. Technol., 2.Toray Research Center)