Kazuki Otsu

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 1:00 PM - 5:15 PM Z26

Oral presentation
| 9 Applied Materials Science
| 9.3 Nanoelectronics

[9p-Z26-1~14] 9.3 Nanoelectronics

3:30 PM - 3:45 PM

[9p-Z26-10] Formation of Microstructures for Nano-gap Electrode Patterns Using Ion Milling

〇Kazuki Otsu^1,3, Hiroshi Suga¹, Kazuhito Tsukagoshi², Touru Sumiya³, Hisashi Shima³, Yasuhisa Naitoh³ (1.CIT, 2.WPI-MANA NIMS, 3.AIST)