Yoshiyuki Nakayama

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 1:30 PM - 4:15 PM Z21

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[9p-Z21-1~10] 8.3 Plasma nanotechnology

3:15 PM - 3:30 PM

[9p-Z21-7] Fabrication of Y-doped InN Films by Glancing-angle Reactive Sputtering

Suzuki Tsukasa¹, 〇Yoshiyuki Nakayama¹, Inoue Yasushi¹, Takai Osamu² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)