Nobuaki Tarumi

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM

[10p-Z10-4] Investigation of Si crystal growth mechanism by in-situ heating TEM and ACOM-TEM

〇Nobuaki Tarumi¹, Shohei Hayashi¹, Naohiko Kawasaki¹, Yuji Otsuka¹ (1.Toray Research Center)