Shun Suzuki

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 8:30 AM - 12:30 PM Z04

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[8a-Z04-1~15] 8.1 Plasma production and diagnostics

12:00 PM - 12:15 PM

[8a-Z04-14] External Parameters Dependence of Incident Radicals and Ions on the Substrate in RF Low-Pressure Tetramethylsilane Plasmas

〇Shun Suzuki¹, Koichi Ishii¹, Akinori Oda¹, Yoshiaki Watanabe², Takayuki Ohta³, Hiroyuki Kousaka⁴ (1.Chiba Tech, 2.Innovation Science Inc., 3.Meijo Univ., 4.Gifu Univ.)

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