Takaki Ota

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:15 PM - 4:45 PM Z25

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.4 & 7.5

[8p-Z25-1~13] 【CS.1】 Code-sharing Session of 2.4 & 7.5

4:30 PM - 4:45 PM

△ [8p-Z25-13] Metal etching by neutral cluster beam irradiation in reactive gas

〇(M1)Takaki Ota¹, Noriaki Toyoda¹ (1.Univ of Hyogo)