11:15 〜 11:30 ▲ [10a-Z24-10] Thickness dependence of antiferroelectricity in ALD ultrathin ZrO2 films 〇(D)Xuan Luo1、Kasidit Toprasertpong1、Mitsuru Takenaka1、Shinichi Takagi1 (1.Univ. of Tokyo)