Nguyen ThiKhanh Hoa

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:30 PM - 2:45 PM

▲ [10p-Z10-7] Investigation on Rapid Solid Phase Crystallization of Amorphous Silicon Films Induced by Micro-Thermal-Plasma Jet

〇(D)Nguyen ThiKhanh Hoa¹, Yuri Mizukawa¹, Hiroaki Hanafusa¹, Shohei Hayashi², Seiichiro Higashi¹ (1.Hiroshima Univ., 2.Toray Research Cent.)