Katsuaki Kawara

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 9:00 AM - 12:00 PM Z20

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[9a-Z20-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:15 AM - 9:30 AM

△ [9a-Z20-2] Planarization in double-layered ELO α-Ga₂O₃ films for the device fabrication

〇Katsuaki Kawara¹, Yuichi Oshima², Mitsuru Okigawa¹, Takashi Shinohe¹ (1.FLOSFIA, 2.NIMS)