Kentaro Saito

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:00 PM - 7:30 PM Z26

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[8p-Z26-1~23] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

4:30 PM - 4:45 PM

[8p-Z26-13] Surface reaction of low-temperature yttrium oxide atomic layer deposition

〇(D)Kentaro Saito^1,2, Kazuki Yoshida^1,2, Masanori Miura³, Kensaku Kanomata³, Bashir Ahmmad¹, Shigeru Kubota¹, Fumihiko Hirose¹ (1.Yamagata Univ., 2.JSPS Research Fellow, 3.Yamagata Univ. ROEL)

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