The 81st JSAP Autumn Meeting, 2020

Kenji Ishikawa

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Chairperson, etc.

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kenji Ishikawa(Nagoya Univ.), Makoto Satake(Hitachi)