[10a-Z14-1~13] 2.3 Application, radiation generators, new technology

[10a-Z14-6] Development of MEMS Lobster eye optics for wide-field X-ray monitor

〇(M2)Tatsuya Yuasa¹, Yuichiro Ezoe¹, Kumi Ishikawa², Masaki Numazawa³, Daiki Ishi¹, Aoto Fukushima¹, Hikaru Suzuki¹, Tomoki Uchino¹, Sae Sakuda¹, Ayata Inagaki¹, Yoko Ueda¹, Haruyuki Hiromoto¹, Kazuhisa Mitsuda⁴ (1.Tokyo Metropolitan Univ., 2.ISAS/JAXA, 3.RIKEN, 4.NAOJ)

Keywords:MEMS, X-ray optics

We have been developing an ultra lightweight X-ray optics based on MEMS technologies.Micropores 20 µm wide are fabricated with dry etching on Si wafer and used the sidewalls as X-ray mirrors. We tried to develop Lobster eye optics newly. The optics focuses X-ray on cross shape but can achieve wide field of view simply in comparison with Wolter Ⅰ type X-ray telescope we have been developing.We will report on fabrication methods and developmental status for MEMS Lobster eye optics.