[10a-Z16-1~9] 4.3 Lasers and laser materials processing

▼ [10a-Z16-9] Flow Velocity Dependency of Microfluidic Sensor of Ultra-thin Glass Sheet Fabricated by Femtosecond Laser Processing

〇(D)YANSHENG HAO¹, CHAOYING FANG¹, MING LI², YAXIAER YALIKUN¹, YOICHIROH HOSOKAWA¹ (1.Div. Mat. Sci., NAIST, 2.Sch. Eng., Macquarie Uni)

Keywords:Femtosecond laser, Microfluidic device, Glass fabrication