[10a-Z16-1~9] 4.3 Lasers and laser materials processing

▼ [10a-Z16-9] Flow Velocity Dependency of Microfluidic Sensor of Ultra-thin Glass Sheet Fabricated by Femtosecond Laser Processing

〇(D)YANSHENG HAO¹、CHAOYING FANG¹、MING LI²、YAXIAER YALIKUN¹、YOICHIROH HOSOKAWA¹ (1.Div. Mat. Sci., NAIST、2.Sch. Eng., Macquarie Uni)

キーワード：Femtosecond laser, Microfluidic device, Glass fabrication