[10a-Z18-1~10] 3.11 Photonic structures and phenomena

[10a-Z18-3] Comparison among the light-emitting impurity centers doped in silicon-on-insulator wafers

〇HISASHI SUMIKURA^1,2, Katsuhiko Nishiguchi², Akihiko Shinya^1,2, Masaya Notomi^1,2 (1.NTT NPC, 2.NTT BRL)

Keywords:Photonic crystal cavity, Light-emitting impurity center, Ion implantation